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Revolutionary Ultra High Vacuum Sputtering System

Yong Zhang introduces the Ultra High Vacuum Sputtering System, a groundbreaking design for world-famous research laboratories of superconducting and quantum devices. This innovative system integrates ergonomic control design and human-computer interaction, setting new standards for modern and intelligent test environments.

This Ultra High Vacuum Sputtering System subverts the traditional model by adopting a modular combination mode for convenient installation, transportation, and maintenance. The sleek and beautiful design, along with the innovative control screen, enhances user experience and functionality.

The system's shell is crafted from high-quality cold plate using sheet metal forming and environmental protection spray technology, while the internal skeleton is made of aluminum and the mask from acrylic material. The design also incorporates screen printing process for the fuselage, ensuring a high-quality finish.

The Ultra High Vacuum Sputtering System can deposit metal and dielectric thin films on substrates up to 300mm, offering versatility with magnetron sputtering sources using RF, DC, or pulsed DC power sources. The system supports fully automatic control, semi-automatic mode, manual mode, and remote maintenance, providing a comprehensive and user-friendly experience.

The project commenced in January 2020 and concluded in November 2020 in Huai'an, Jiangsu Province, China. The Ultra High Vacuum Sputtering System is a result of a school-enterprise cooperation project, leveraging the university's scientific research background and technical conditions for an improved product design.

Yong Zhang, an Associate Dean and Associate Professor at the College of Art Design, Liaoning Petrochemical University, has been recognized for this innovative design, receiving the Bronze A' Design Award in Manufacturing and Processing Machinery Design in 2021. The system's unique properties and exceptional design have set a new benchmark in the industry, showcasing the fusion of art, science, and technology.

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